Sheet Resistivity Probing

Station for wafer 12" 8" 6" and LCD substrate optionally

EB SHEET RESISTIVITY PROBER

In addition to the sheet resistivity ambient test stand for 2"~12" (50mm~300mm) wafer,
we welcome custom-made for the following two aspects:

for substrate area larger than 300mmx300mm
1. What kind of the substrate is it?
2. How large is your substrate?
3. What kind of following structure?
　a.) Probe Head Moveable with substrate fixed
　　The larger size of the substrate,the more space saving.
　b.) Substrate moveable with probe head fixed
4. How to drive?Manual/Motorized/Auto
5. Need the test at certain temperature?

for substrate test at certain tempterature from ambient to 300 degree C
The hot chuck is controlled by the PID controller to pre-set the hot at the test temperature.
The hot chuck is moved around by the vacuum mouse pad at the right hand side.At the certain location,releasing the vacuum buttom the vacuum pad will be sucked on the flat mouse plate.
The hot chuck is simultaneously fixed at that location.At that time,4-point probe head is
driven down for resistivity test.After the test,lifting up the 4-point probe head then moving
the hot chuck to next location.
1. How high is the MAX.temperature 150,300,400,500 degree C?
2. How to drive the probing head?Hand/Pneumatic
3. Do you need the protection box?
4. Do you need the modular cooling tank?