LCD/OLED inspection
PCB inspection
Laser Repair

LCD/OLED for the client size
microscope station custom-made for the client LCD size
Lomg working microscope station custom-made for the client PCB size
Wafer LCD & OLED for both New Wave and Hoya

EB LARGE SIZE SUBSTRATE INSPECTION STATION

This one is custom-made inspection station for large
size substrate like LCD,OLED & PCB for the max.size
1200mmx800mm.There are two kinds of mechanism
design. Firstly, the chuck can be moved around with
the travel covering the substrate size width & depth
underneath the fixed microscope.The fine stage of
microscope can be positioned with travel 1"x1".
Secondly,the microscope can be moved around with
the travel covering the substrate size width & depth
over the fixed chuck. No matter whichever kinds the
microscope comes with pneumatic quick up for
easy loading and unloading the large size substrate.

We are able to make the following inspection features.

Chuck Vacuum pattern Custom-Made
The vacuum ring and hole can be requested by the customer to accommodate
the different size of of the substrates on the vacuum chuck.

Chuck Theta
This is used to aligned the substrate to the microscope X-Y.

Chuck Inclination
Inclination can be adjustable for observing the defect further at certain angle.

Linear Scale with digital travel display
This can allow the customer know how far the stage move with
resolution 1 micron.

2D Measurement Software
The geometry image is captured by the computer to measure the size
with user-friendly software.Before that,the calbrated recticle has to be
used to calibrate each objectives.

Back Light
The 150W white light can be electronically steplessly controlled.

Mask Inspection
Mask holder can be mounted onto the optional back light chuck.

Laser Repair
Green,IR & UV laser both for Hoya & New Wave can be mounted
onto the microscope.

Laser Data Sheet

Vibration Free Table
This can isolate the vibration greatly from ground.