Mask Inspection

MIS-77Manual Mask Inspection Station

MIS-99Manual Mask Inspection Station

 

MIS-77 Manual Mask Inspection Station
This affordable station is used to find the sub-micron defects.The coaxial mask stage can be push or pull manually to the proper area.In addition,it can be finely positioned by the knobs X-Y underneath the stage in one palm only.The rack and gear with angled teeth enhance the movement torque transmission by the control knob.The teeth are nickel plated for clean room use.The stand is ruggedly made by the cast aluminum with larger footprint for stable and durable production use.
The microscpe is the MITUTOYO who is the largest sulpplier for long working distance compound microscope.
The feature of MITUTOYO are
  1. Better resolution on the lens
  2. Polarization and DIC function
  3. NIR and NUV objectives for versatile application like laser cutting and IR camera ¡@
¡@imaging.
  4. Higher magnification objective like 200X for the total magnification up to 4000X
In addition to the reflected the bright field lighting thru the micrscope, all the lighting including reflected darkfield angled lighting from the rear ,transmitted bright field right underneath and transmitted dark field angled lighting underneath from four corners use cold fiber light,
The features of cold fiber light are  
  1. The light intensity can be continuously adjusted with max. 150W by the remote
¡@illuminator.
  2. The light spot could be much concentrated by the fiber.This allows the angled lighting
¡@both for the reflected and transmitted can target the same defect much easily.
  3. All the burn lamps can be replaced easily in the remote illuminator. It is quite difficult to
¡@reach the lamps for reflected darkfield angled lighting from the rear ,transmitted bright
¡@field right underneath and transmitted dark field angled lighting underneath from four
¡@corners designed by other vendor.
Specifications:
  Mask reticle sizes: 4" (101.6mm) to 7" (177.8 mm) with or without pellicle
Reflected bright field thru microscope and darkfield angled lighting from the rear all are
illuminated by the remote light source thru fiber.
Transmitted bright field right underneath and dark field angled lighting underneath from four corners all are illuminated by the remote light source thru fiber.
MITUTOYO Microscope 10X eyepieces, 2X, 10X, and 20X objectives with zoom feature 1X~2X
Cleanroom Compatible
Dimensions: W 20" X D 30"X H25"
Option Available:
  ¡P 50X objective and mask paddle Recommended
¡P CCD Imaging Kit
¡P Digital readout for easy re-location
¡P Motorized Scanning with joystick
¡P Semi-automatic scanning program by keyboard and mouse
Repair Service:
  ¡P Repair,maintenance and calibration for
¡@mechanism like coaxial stage,focus
¡@microscope like lens,illumination

 

 
MIS-99 Manual Mask Inspection Station
This affordable station is used to find the sub-micron defects.The coaxial mask stage can be push or pull manually to the proper area.In addition,it can be finely positioned by the knobs X-Y underneath the stage in one palm only.The rack and gear with angled teeth enhance the movement torque transmission by the control knob.The teeth are nickel plated for clean room use.The stand is ruggedly made by the cast aluminum with larger footprint for stable and durable production use.
The microscpe is the MITUTOYO who is the largest sulpplier for long working distance compound microscope.
The feature of MITUTOYO are  
  1. Better resolution on the lens
2. Polarization and DIC function
3. NIR and NUV objectives for versatile application like laser cutting and IR camera
¡@imaging.
4. Higher magnification objective like 200X for the total magnification up to 4000X
In addition to the reflected the bright field lighting thru the micrscope, all the lighting including reflected darkfield angled lighting from the rear ,transmitted bright field right underneath and transmitted dark field angled lighting underneath from four corners use cold fiber light,
The features of cold fiber light are
  1. The light intensity can be continuously adjusted with max. 150W by the remote
¡@illuminator.

2. The light spot could be much concentrated by the fiber.This allows the angled lighting
¡@both for the reflected and transmitted can target the same defect much easily.
3. All the burn lamps can be replaced easily in the remote illuminator. It is quite difficult to
¡@reach the lamps for reflected darkfield angled lighting from the rear ,transmitted bright
¡@field right underneath and transmitted dark field angled lighting underneath from four
¡@corners designed by other vendor.
Specifications:  
  ¡P Mask reticle sizes: 4" (101.6mm) to 9" (228.6 mm) with or without pellicle
¡P Reflected bright field thru microscope and darkfield angled lighting from the rear all are illuminated by the remote light source thru fiber.
¡P Transmitted bright field right underneath and dark field angled lighting underneath from four corners all are illuminated by the remote light source thru fiber.
¡P MITUTOYO Microscope 10X eyepieces, 2X, 10X, and 20X objectives with zoom feature 1X~2X
¡P Cleanroom Compatible
¡P Dimensions: W 20" X D 30"X H25"
Option Available:
  ¡P 50X objective and mask paddle Recommended
  ¡P CCD Imaging Kit
  ¡P Digital readout for easy re-location  
  ¡P Motorized Scanning with joystick  
  ¡P Semi-automatic scanning program by keyboard and mouse
Repair Service:
  ¡P Repair,maintenance and calibration for
  ¡@mechanism like coaxial stage,focus
  ¡@microscope like lens,illumination