Low current Enclosure

Shielding Box(Custom-made)

　This is the shielding box,so called the dark box made as the Faraday Cage for EMI protection.EMI is really concern especially for low current measurement.The better metal hielding,the lower current you can measure.
　The structure is composed of two feedthru panels left & right.The feedthru on the feedthru anel have to be specified prior to ordering.Mostly they are female to female x 8 cs/panel.Please hoose among triaxial/triaxial,triaxial/coaxial & coaxial/coaxial.The cabling tunnel located at the ear side is used for hot chuck cabling and cooling tubing OR probe card signal cabling.The vacuum valve shut off the vacuum from outside to prevent the noise from vacuum pump from oing to the wafer side.The nitrogen valve is used to control the flow of the nitrogen to create a ocal dry environment at the probing area for low current measurement.The lock in the front can revent the unauthorized personnel from using the probe station inside.

Standard size :880mmWx710mmDx1140mmH