Low Current Chuck
Triaxial & coaxial Chuck
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IsoChuck High Performance Chuck for your needs In the probing industry, the demand for improved test performance is critical. The ISO-CHUCK solution can upgrade your existing probe system with an advanced design with lower capacitance, low current leakage, and provide an excellent solution for high voltage test environments. The power of the ISO-CHUCK design is in its nonconductive, lightweight material. The applied metallization to this fixture in specific areas supplies surface connection and isolated shielding components resulting in advanced performance for the probing industry. |
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| The wafer chuck capacitance in the 4", 6" and 8" test environments was a controllable factor. With the current advancements in the 300mm wafers, this is no longer a minor factor to overcome. The low density material of the ISO-CHUCK design, compared to its 300mm metal counterparts, provides advantages in mechanical repeatability due to the lower mass. The low dielectric constant provides very low chuck capacitance in the Triaxial versions of less than 200pF, and less than 10pF with a driven guard! | |||
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Coaxial Version The newly announced ISO-CHUCK series was designed to improve the test performance required from the semiconductor industry. With the wafer sizes growing to over 300mm, the capacitance of conventional wafer chucks has also grown. This increase in capacitance causes problems in several aspects of wafer probing. |
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| The ISO-CHUCK was designed to reduce the weight and mass of the wafer chuck, as well as improve test performance as noted in the following documentation. Review for yourself the clear difference the ISO-CHUCK can provide in DC parametric, Kelvin contacts, and high voltage breakdown strength. | ||
| Kelvin Version One of the many materials that EB has chosen for the ISO-CHUCK design is Ultem. This material has solid mechanical & light weight properties, with excellent electrical properties, and a dielectric constant of 3.15 with a volume resistivity of 1.0x1017. |
ISO-CHUCK for Electroglas 2001 with dual BNC connectors |
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