FLAT PANEL PROBE STATION LCD 1300mmx900mm
This one is custom-made station.The chuck size
is made according to the customer requirement like 500mmx500mm,500mmx400mm
or 16"x14".We can
design chuck up/down or platen up/down,OR one station can be
 have both function chuck and platen up/down.For the laser repair application,laser
is mounted onto the microscope with the transmitted white lite from the
bottom.Customer push the chuck to the certain location by hand.After turning
on the pneumatic brake X-Y to hold the chuck securely,position the chuck
fine X-Y to find the repair target with 10 or 1 u resolution.
Chuck Vacuum pattern Custom-Made
The vacuum ring and hole can be requested by the customer to accommodate
the different size of of the substrates on the vacuum chuck.
Low Current Measurement
The combination of the shielding Box and triaxial tip holder can measured
the current level around 100fA
Probe Card Measurement
This allows the customer to make couple tens of needles (or hundred of
needles)
Hot Envirinment Measurement
The hot chuck can be set the range from RT to 100 degree C.
Vibration Free Table
This can isolate the vibration greatly from ground.
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